Deposition MRT Series

MRT300 is a fully automated high-magnetic-field annealing system for 300mm wafers which suitable for R&D, prototype manufacturing, small volume production. The system provides variable magnetic field (up to five Tesla), 25 wafers in a batch, and strengthens the temperature control up to 550 degrees C plus or minus 1 degree, with high throughput rapid ramp over technology. Furthermore, applying wide range of magnetic field angle processes (in-plane, out of plane) by some parameter control of recipe management software, it allows repeatable temperature control without any hardware changes.

MRT5000 is a fully automated high-magnetic-field annealing system for 150mm and 200mm wafers. The system provides variable magnetic field (up to five Tesla), 25 wafers in a batch, strengthen the temperature control up to 550 degrees plus or minus 1 degree, with high throughput oven technology. Differential cooling of two chambers within the oven achieves fast thermal cool-down under high vacuum or inert gas conditions, providing shorter processing time and increased throughput. Combined high throughput oven technology with safety-conscious superconducting magnet design, it has achieved unsurpassed wafer throughput and tool up-time. This has established the MRT5000 as the production standard for high field magnetic annealing of thin film heads.

MRT200 is a modular platform for magnetic annealing of 150mm and 200mm wafer size with magnetic fields up to 0.2 Tesla and at temperatures up to 400 degree C. The tool incorporates a magnet design that minimizes the stray magnetic field of the tool, allowing the installation of multiple tools in close proximity for volume production. The tool can be supplied with a single process module or can be configured with multiple process modules. Product can be manually or automatically loaded, with a single wafer handling robot addressing the process modules. This design provides high wafer throughput in a compact package, incorporating unrivalled process flexibility and reliability.

MATr is a magnetic annealing system, enabling to process various substrates to a maximum of 200mm wafer size. The system provides up to 2 Tesla variable magnetic field and capable of ten wafers in a batch. The optimized shielding design allows the space efficient, compact system which suitable for the research or laboratory use. The system configuration/option is selectable for individual customer’s needs.

MATrSM is a Setting Magnet system which provides up to 3 Tesla Magnetic Field and auto-sample handling. The system is capable of handling various samples such as wafer/HGA/Media Platter, etc. The system is operated by SEMI Standard software and configures touch-screen, barcode reader, data/event logging, recipe management and multi-level security access function.