The Probus-SiC™ series is an automated SiC epitaxial film growth equipment developed by incorporating state-of-the-art technologies such as vacuum technology, transfer technology and high-temperature control technology that TEL has cultivated in the semiconductor manufacturing equipment market. We introduced the most advanced technology in the equipment at all times required by the production site listening carefully to the market needs that evolved as the SiC market grew. As a result, the equipment has capability required not only for process performance side but also for mass production side such as safety, maintenance, operability and reliability, and its performance has been highly appreciated at mass production sites all over the world.
