Accelerating growth of mobile networks for smart society by leading-edge smartphones, intelligent cars and innumerable connected IoT devices is expanding the business opportunities for frequency control devices which consist of a number of RF filters. As the cellular market moves to higher frequencies, sensitive control is highly required to meet 4G as well as pre-5G and 5G deployment needs. An energetic, directional, chemical Gas Cluster Ion Beam (GCIB) is used for trimming process to control device parameters of RF filters, MEMS, photonic devices, and other various applications. TEL’s UltraTrimmer series provides precise control of film thickness by reducing surface roughness. Cutting edge technology enables industry leading performance: sub-nanometer thickness control, a wide range of dynamic correction and high-throughput processing. UltraTrimmer series realizes a variety of custom process profiles for silicon or compound substrate and contributes to yield improvement and performance enhancement.