TOKYO ELECTRON LIMITED

Products

The minimum line width of the latest semiconductor circuits is no greater than a few dozens of atoms.
As semiconductors continue to shrink in size and become more diverse and complex, innovation in the repeated patterning process becomes crucial.
Tokyo Electron is the only manufacturer offering system solutions for all four sequential patterning processes.

Semiconductor production equipment

Coater/Developer

Etch

Cleaning

Deposition

Test

Wafer Bonder/Debonder

Wafer Edge Trimming

Wafer Thinning System

SiC Epitaxial CVD system

Gas Cluster Ion Beam system

Display production equipment

FPD