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*Only IR news are available for 2010～2016.
All Topics Products / Services IR Sustainability Event Disaster

Tokyo Electron Releases LEXIA™-EX, a New Sputtering System

Topics Products / Services IR Sustainability Event Disaster

Tokyo Electron Launches Ulucus™ LX, an Extreme Laser Lift Off System for 300ｍｍ Wafer-Bonded Devices

Topics Products / Services IR Sustainability Event Disaster

Tokyo Electron Launches Acrevia™, a Gas Cluster Beam System for Ultra-Fine Patterning in EUV Lithography

Topics Products / Services IR Sustainability Event Disaster

Tokyo Electron Launches Single Wafer Deposition Systems Episode™ 1 and Episode™ 2 DMR, Announces Planned Release of Episode™ 2 QMR

Topics Products / Services IR Sustainability Event Disaster

Tokyo Electron Launches Ulucus™ G, a wafer thinning system for 300ｍｍ wafer fabrication

Topics Products / Services IR Sustainability Event Disaster

Tokyo Electron Develops an Extreme Laser Lift Off Technology That Contributes to Innovations in 3D Integration of Advanced Semiconductor Devices

Topics Products / Services IR Sustainability Event Disaster

Tokyo Electron Announces Launch of Plasma Etch Modules PICP™ EX Plus and APX for 8.7th Generation Flat Panel Displays

Topics Products / Services IR Sustainability Event Disaster

Tokyo Electron Develops Memory Channel Hole Etch Technology That Enables Ultra-fast 10-µm-deep Etching for 3D NAND Flash with Over 400 Layers and an 84% Reduction of Global Warming Potential

Topics Products / Services IR Sustainability Event Disaster

Tokyo Electron Introduces CELLESTA™ MS2, a Surface Preparation System

Topics Products / Services IR Sustainability Event Disaster

Tokyo Electron Introduces Ulucus™ L, a Laser Edge Trimming System for 300ｍｍ Wafer-Bonded Devices

Topics Products / Services IR Sustainability Event Disaster

Tokyo Electron Introduces Tactras™-UDEMAE™, the Etch System for 300mm Power Devices

Topics Products / Services IR Sustainability Event Disaster

Tokyo Electron Announces the Launch of PICP™ Pro Plasma Etch Systems for Manufacturing 8th Generation Flat Panel Displays

Topics Products / Services IR Sustainability Event Disaster

Tokyo Electron Introduces Prexa™, the Next-Generation 300mm Wafer Prober

Topics Products / Services IR Sustainability Event Disaster

Tokyo Electron Announces the Launch of PICP™ Pro Plasma Etch Systems for Manufacturing High Resolution Flat Panel Displays

Topics Products / Services IR Sustainability Event Disaster

TEL Introduces Episode™ UL as the Next Generation Etch Platform

Topics Products / Services IR Sustainability Event Disaster

TEL Announces the Launch of CELLESTA™ SCD, a Single Wafer Cleaning System

Topics Products / Services IR Sustainability Event Disaster

TEL Announces the Launch of Elius™500 Pro, an Inkjet Printing System for OLED Display Production

Topics Products / Services IR Sustainability Event Disaster

TEL Announces the Launch of CELLESTA™ Pro SPM, a Single Wafer Cleaning System

Topics Products / Services IR Sustainability Event Disaster

TEL announces the launch of MERCURY™+, a Batch Spray Cleaning System, with shipments starting in March 2019

Topics Products / Services IR Sustainability Event Disaster

TEL Announces the Launch of Impressio™3300 PICP™, a Dry Etch System for Manufacturing G10.5 High-Definition Flat Panel Displays

Topics Products / Services IR Sustainability Event Disaster