TOKYO ELECTRON LIMITED

Spare Parts/Repairs

Spare Parts Service

Genuine parts are designed to demonstrate the maximum performance of TEL equipment, and we always provide stable performance resulting from strict quality checks.
Through further performance improvements and refurbishment, we also doing work to realize low CoO and CoC.
In order to always provide necessary spare parts to customers when needed, we store an optimized inventory in our global distribution network warehouse. We delivery promptly to customer fabs from warehouses in each country, including Japan and the United States, to support high availability of equipment.

You can reference the spare parts catalog and inventory information from TELCustomer.com.

Repair Service

TEL repair service provides the high-quality and flexible service distinctive to certified suppliers or OEM vendors.
We are tackling shortened repair delivery by localizing repairs.