Engineering Services

Tokyo Electron strives to provide equipment support to the satisfaction of customers worldwide. We have anticipated transitions over time and diversified customer needs by arranging an organization that can provide global support.

TEL Service Advantage

TEL Service Advantage, which is built as the TEL global support organization, allows customers to select a service plan that fits their needs. Through TEL Service Advantage, we can quickly respond to customer requests and technical advancements.

TEL Service Advantage provides various plans to maximize equipment maintenance efficiency for customers and productivity from equipment manufactured by TEL. Because TEL Service Advantage support plans can be combined to meet customer needs, you can obtain maximum results.

TEL Field Service

We provide engineering support to meet customers’ requests and goals.

TEL Field Service
On-site field engineer support
Resident TEL engineer support at a customer’s fab.
Bank of hours
Pre-paid service guaranteeing priority response times from TEL field engineers.
PM support
TEL field engineers implement periodic maintenance (PM) of your equipment.
Phone support
Remote support by telephone from a TEL specialist. In combination with TELeMetrics™, this service can provide support equivalent to on- site support.


TEL analyzes equipment data from various sensors using a remote connection and provides solutions matched to customer-specific problems such as differences between equipment, throughput improvement, and predictive maintenance. is our on-line portal allowing you to view up-to-date information regarding the equipment you purchased.

My Tools
Information about delivered equipment
Products and paid service (modifications, etc.)
Spare Parts
Spare parts and related services
Support and related services
Equipment training and related services

TELeMetrics is registered trademarks or trademarks of Tokyo Electron Limited in Japan and/or other countries.