Engineering Services

Tokyo Electron strives to provide equipment support to the satisfaction of customers worldwide. We have anticipated transitions over time and diversified customer needs by arranging an organization that can provide global support.

TEL Service Advantage

TEL Service Advantage, which is built as the TEL global support organization, allows customers to select a service plan that fits their needs. Through TEL Service Advantage, we can quickly respond to customer requests and technical advancements.

TEL Service Advantage provides various plans to maximize equipment maintenance efficiency for customers and productivity from equipment manufactured by TEL. Because TEL Service Advantage support plans can be combined to meet customer needs, you can obtain maximum results.

TEL Field Service

We provide engineering support to meet customers’ requests and goals.

On-site field engineer support: Resident TEL engineer support at a customer’s fab.
Bank of hours: Pre-paid service guaranteeing priority response times from TEL field engineers.
PM support: TEL field engineers implement periodic maintenance (PM) of your equipment.
Phone support: Remote support by telephone from a TEL specialist. In combination with TELeMetrics™, this service can provide support equivalent to on- site support.

TELeMetrics™

TEL analyzes equipment data from various sensors using a remote connection and provides solutions matched to customer-specific problems such as differences between equipment, throughput improvement, and predictive maintenance.