Research and Development

Research and Development of Tokyo Electron

Tokyo Electron continues to invest in R&D to deliver innovative technologies to address
the diversified and complicated needs of the semiconductor and flat panel display industry.

Global R&D Facilities

Each factory has played an important role in development, along with internal global R&D sites and through collaboration with leading-edge consortia,
TEL continues to create and provide valuable solutions for the industry by challenging technology limits and overcoming barriers.

Technical column

  • R&D Highlights

    VOL.5 Semiconductor Manufacturing Equipment and Measures to Protect the Earth's Environment

    Over the years, many countries on our planet have...

  • Conference presentations

    Must See for Process Engineers: SPIE Advanced Lithography + Patterning 2023

    The SPIE Advanced Lithography will be held form F...

Open innovation


    Investments to innovative technologies.

  • Supply chain initiative

    TEL invites companies and institutions to put forward proposals for technologies that will improve the environmental friendliness of TEL’s products.