Research and Development

Research and Development of Tokyo Electron

Tokyo Electron continues to invest in R&D to deliver innovative technologies to address
the diversified and complicated needs of the semiconductor and flat panel display industry.

Global R&D Facilities

Each factory has played an important role in development, along with internal global R&D sites and through collaboration with leading-edge consortia,
TEL continues to create and provide valuable solutions for the industry by challenging technology limits and overcoming barriers.

Technical column

  • R&D Highlights

    VOL.2 EUV Direct Patterning- The next generation

    The momentum behind EUV patterning is acceleratin...

  • Innovation

    SEMICON West 2018

    The topic at this time is SEMICON West 2018 held ...

Open innovation


    Investments to innovative technologies.