Research and Development

Research and Development of Tokyo Electron

Tokyo Electron continues to invest in R&D to deliver innovative technologies to address
the diversified and complicated needs of the semiconductor and flat panel display industry.

Global R&D Facilities

Each factory has played an important role in development, along with internal global R&D sites and through collaboration with leading-edge consortia,
TEL continues to create and provide valuable solutions for the industry by challenging technology limits and overcoming barriers.

Technical column

  • R&D Highlights

    VOL.3 The history of semiconductor manufacturing equipment and data usage

    It is no exaggeration to say semiconductor manufa...

  • Conference presentations

    IDW'18 (International Display Workshops)

    International Display Workshops 2018 (IDW ’18) wi...

Open innovation


    Investments to innovative technologies.