Research and Development

Research and Development of Tokyo Electron

Tokyo Electron continues to invest in R&D to deliver innovative technologies to address
the diversified and complicated needs of the semiconductor and flat panel display industry.

Global R&D Facilities

Each factory has played an important role in development, along with internal global R&D sites and through collaboration with leading-edge consortia,
TEL continues to create and provide valuable solutions for the industry by challenging technology limits and overcoming barriers.

Technical column

  • R&D Highlights

    VOL.4 Yield Enhancement Technology: Efforts to Suppress Nanosized Particles in Semiconductor Production Equipment

    The currently dominant semiconductor process size...

  • Conference presentations

    The 73rd Annual Gaseous Electronics Conference

    The 73rd Annual Gaseous Electronics Conference wi...

Open innovation


    Investments to innovative technologies.