IITC2025
Event Summary
-
Date
-
2025.06.02 - 2025.06.05
-
Location
-
Busan, Korea
-
Target
-
Device Engineer Process Engineer
Tokyo Electron (TEL) is proud to be a sponsor of the 2025 IEEE International Interconnect Technology Conference (IITC), which will be held June 2-5 in Busan, Korea. TEL will give two presentations. Please join us!
Tuesday, June 3, 2025
Session 02 : Advanced Interconnects I
"Post-Cu CMP leakage suppression using sequential small molecular inhibitor treatment"
Takumi Nishinobo, Kai-Hung Yu, Ryota Yonezawa, Suzuki Hidenao, Aizawa Hirokazu, TEL Technology Center, America, LLC
Wednesday, June 4, 2025
Poster Session
P14.
“Thermal detection methods for rapid laser process and first reuse of the carrier wafer released by Laser Lift-Off (LLO) process”
Jungrae Park, Joshua Peck, Tushar vijaykumar Meshram, Ilseok Son, Joshua Hooge, Angelique Raley, Yoshihiro Kondo, Sitaram Arkalgud, TEL Technology Center, America, LLC
