TOKYO ELECTRON LIMITED

To Become “One Of a Kind” Factory of TEL

Technology

In July 2024, Tokyo Electron (TEL) Group released a new product, Acrevia™ , which is 300 mm wafer process equipment. TEL Manufacturing and Engineering of America played a central role in the development and manufacturing of this product that utilizes core technology of semiconductor production equipment. Three executives from the company, which holds a unique position within the TEL Group, discuss about its mission and future prospects.

Profile

  • Mark Dougherty (Mark)

    President of TEL Manufacturing and Engineering of America and Tokyo Electron America. He has been with TEL for four years since spending 28 years in wafer fabs, technology, and manufacturing with IT or Semiconductor companies.
  • Jun Kitano (Jun)

    Kitano jointed TEL in 1991. He works as Senior Vice President at TEL Manufacturing and Engineering of America and concurrently holds the position of General Manager at Tokyo Electron Kyushu. He has been relocated to Minnesota as an expat since January, 2024.
  • Kan Ishida (Kan)

    Ishida joined the company in 1994. He serves as Vice President & General Manager of DSS* Business Unit (BU), and Chair of TEL Manufacturing and Engineering of America.
  • TEL Manufacturing and Engineering of America

    It was established in 2019 and located in Chaska, Minnesota. Its business covers development, manufacturing, and sales of surface preparation system, gas cluster beam (GCB) technology for diverse semiconductor applications and emerging nanotechnology markets.
  • Diverse Systems and Solutions

Pipeline to Accelerate Innovation

What is the mission of TEL Manufacturing and Engineering of America as well as its position within the TEL Group?

Mark

While the mission of TEL Manufacturing and Engineering of America includes expanding the sales of existing products and contributing to revenue growth for TEL, our most forward-looking mission is all framed around the introduction of new leading-edge product technology into the market. We have some novel technology that does not exist anywhere else in TEL. With the support of the corporation, we are now able to turn that into real solutions for our customers.

Jun

We also function as a US-based hub for the TEL Group. We have TEL Technology Center, America, a site for R&D and process integration, as well as Tokyo Electron America, which is a hub for semiconductor knowledge. By utilizing R&D information collected from these sites, TEL Manufacturing and Engineering of America strives to reduce the lead time taken from development to production and deliver our equipment to our customers even faster. As device manufacturing is becoming increasingly more complex, acceleration of R&D is essential for TEL’s future business to meet customer demands.

Mark

New innovative ideas originate either in the United States or in Japan. TEL Manufacturing and Engineering of America has the unique capability to rapidly prototype equipment as a part of our mission. Whether these new concepts are transferred to factories in Japan or end up as products manufactured by TEL Manufacturing and Engineering of America in the United States, I think it’s very clear that we are now playing a valuable role for TEL.

Applying Best Practices from Japan

TEL Manufacturing and Engineering of America is now aiming to become the TEL’s “One Of a Kind Factory” following three factories in Japan: Tokyo Electron Technology Solution, Tokyo Electron Miyagi, and Tokyo Electron Kyushu. What initiatives are you focusing on?

Mark

One of the main initiatives is increasing production capacity. With several of our new products entering the market and ramping to the HVM (high-volume manufacturing) stage, we need to respond well to product demand shifts to maximize sales. It includes continuous optimization of the factory layout, improvements in manufacturing methods, acquisition of additional staff, and more.

Jun

Another initiative is applying known engineering methods and processes from Japan. We established a development flow by referencing the system of our factories in Japan. Following that, we have implemented several new systems into TEL Manufacturing and Engineering of America with support from Japan. For example, systems related to development, quality management, and safety. Going forward, we will continuously optimize the system to maintain the quality of Japanese factories through continuous efforts.

Mark

TEL Manufacturing and Engineering of America can observe what is being done in Japanese factories, take best practices, and apply them in addition to our current practices. We’re very blessed to have some experienced senior leaders from each area as expats in TEL Manufacturing and Engineering of America. We can learn directly from their experience and coaching in order to more rapidly achieve higher levels of performance. Our vision is ultimately to become the best at the TEL Group.

Striving for an Even Higher Standard

Do you have any immediate challenges to establish the TEL standard?

Mark

The challenge we always have is “understanding”: ensuring that we don’t accept a superficial level of the best approach but have dialogue to understand at a very deep level the thought process, necessary tools and skills, etc. We want to move quickly, but we also need to take time to have appropriate discipline. It requires deep dialogue and investigation.

Jun

We will further enhance safety as well. We have established a new safety team within TEL Manufacturing and Engineering of America. We will make a strong safety, environmental, and health team.

Mark

“Safety, quality, and compliance” are always our number one priority. These will remain our main focus, although we have had a good track record of safety in the factory, which has been recognized repeatedly in the state of Minnesota. We recognize that all elements of quality also need to be elevated, starting from supply chain, manufacturing quality, and then, ultimately, our service quality out in the field.

Fruits of the Collaboration Between the US and Japan

TEL Manufacturing and Engineering of America released a new product, Acrevia™, in July. What do you expect for it?

Mark

Acrevia™ has been the centerpiece of our product strategy in this recent period. Since TEL Manufacturing and Engineering of America was established in 2019, it’s the first leading-edge product introduced to the market. In that sense, it’s emblematic of our journey and success in terms of contribution to TEL. In addition to its capabilities that allow our customers to achieve high yield at a lower cost, Acrevia™ will offer them many other applications that will develop in the future.

Jun

The success of Acrevia™ is important not only for TEL Manufacturing and Engineering of America and TEL, but also for our customers. Our customers will implement the product into high NA EUV (numerical aperture extreme ultra-violet) lithography systems. If we can successfully develop several applications, customers’ total production efficiency will be dramatically enhanced using our tool.

Kan

Acrevia™ was born in the United States, while also supported by the TEL Japan team for sales, development, quality, field support, etc. TEL has extensive field experience, having installed over 93,000 tools for customers worldwide. By combining US & Japan team efforts and cooperation, I believe we can contribute to customer satisfaction, especially for those who are manufacturing cutting-edge devices.

Jun

That’s right. In addition to Acrevia™, we will work on future project in collaboration with the corporate R&D team, Japanese factories, and Tokyo Electron America. It will be truly the combined efforts of the group. I think these kinds of group-wide projects are a first-time experience for TEL, so I’d like to accelerate and pursue further collaboration.

Acrevia™ developed by TEL Manufacturing and Engineering of America with its proprietary GCB (gas cluster beam) technology

Mark

Building on your comment, I do feel strongly that TEL Manufacturing and Engineering of America is positioned quite uniquely within the TEL Group. TEL is looking at these new product development approaches as a model for what is possible across the rest of the company. Combining technology from the United States with concepts and components from Japan, it is a truly exceptional example of collaboration in an advanced space, leading to tangible outcomes. While it is exciting, we also feel a strong sense of responsibility at the same time because we are aware of the attention from top management.

Across Factory Network

Lastly, what are your aspirations for the future?

Mark

TEL Manufacturing and Engineering of America has the unique benefit of being able to capitalize on knowledge and technology from our Japan domestic factories while integrating that with our own unique technology. Our intent is to successfully grow the scale of manufacturing and development in the US, and the support and exchange of information with the larger factories has been a critical ingredient in our progress.

Jun

As we mentioned previously, TEL Manufacturing and Engineering of America is a very unique factory in the TEL Group and has leading-edge products, mature products, and a lab-to-fab pipeline. We are hoping to contribute to TEL’s business and accelerate R&D for the TEL Group. Our unique activities will be achieved by all TEL supporters. We would like to develop very strong connections with all of them and give back to the TEL Group by successfully becoming the One Of a Kind Factory.
We have about 30 expats from Japan, and also receive support from Japan with six or seven people dedicated to supporting us remotely as well. Their support definitely accelerates our growth.

Kan

TEL Manufacturing and Engineering of America has diverse members with various nationalities and backgrounds. They are all actively engaged in development, manufacturing, and sales. Becoming One Team as TEL, we believe there will be potential to continuously provide exciting innovations driven by new TEL’s DNA. Eeveryone has burning enthusiasm in their hearts. We’re welcoming those who are interested in TEL and working on this kind of project!


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