TOKYO ELECTRON LIMITED

The 7th Electronic Device Forum Kyoto

Event Summary

Date

2020.10.29 - 2020.10.30

Location

Kyoto / virtual conference

The 7th Electronic Device Forum Kyoto will be held as an onsite and online virtual conference, on October 29-31. This forum will focus on general electronic components, semiconductors, and other electronic devices. Tokyo Electron (TEL) will have the honor of participating in a presentation of the latest trends for etch technologies represented by ALE technology and high aspect processing. These etch technologies enable physical scaling and stacking many layers for advanced semiconductor devices. There will be a special presentation made by TEL titled “Dry etching technology trend for leading edge semiconductor devices”, we very much hope you will be able to join us for this event. For additional information, please visit the related link.

Invited talkDry etching technology trend for leading edge semiconductor devices

W. Sakamoto(Tokyo Electron Miyagi Ltd.)