SSDM2020
Event Summary
-
Date
-
2020.09.27 - 2020.09.30
-
Location
-
virtual conference
International Conference on Solid State Devices and Materials 2020 will be held as an online virtual conference, on September 27-30. The SSDM, with 52 years, is one of the most traditional international conferences. The conference mainly will focus on solid-state devices and materials related to semiconductors. Tokyo Electron (TEL) and collaborators will have the honor of participating in a presentation on thin films grown by Atomic Layer Deposition.
For additional information, please visit the related link.
Chemical Structure of SiN Films Deposited on High Aspect Trench by Plasma Enhanced Atomic Layer Deposition
T. Nishihara*1, R. Yokogawa*1,2, Y. Otsuki*3, M. Kagaya*3, and A. Ogura*1,2
*1 School of Science and Technology, Meiji University
*2 Meiji Renewable Energy Laboratory
*3 Tokyo Electron Technology Solutions Limited
