SCEJ 51st Autumn Meeting
Event Summary
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Date
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2020.09.24 - 2020.09.26
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Location
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virtual conference
The SCEJ 51st Autumn Meeting will be held as an online virtual conference, on September 24-26. Various academic topics will be actively discussed on this conference. Tokyo Electron(TEL) will have the honor of participating in an invited talk. TEL will give an online presentation with detailed explanation about the thin-film deposition technology for the advanced semiconductor devices. You can access to the programs via online. For additional information, please visit the related link.
Invited talkConcept, design and future of semi-batch type ALD equipment and process
K. Hitoshi, S. Yuji (Tokyo Electron Technology Solutions Limited)
