Notice regarding the Status of Share Repurchase (Under the provisions of its Articles of Incorporation pursuant to paragraph 2, Article 165 of the Companies Act of Japan)

Tokyo Electron Limited ("Tokyo Electron") announced that Tokyo Electron executed repurchase of its own shares as stated below in accordance with the resolution of the Board of Directors' meeting held on April 27, 2015, under Article 156, as applied pursuant to paragraph 3, Article165, of the Companies Act.

1. Type of shares acquired:                            Shares of common stock
2. Total number of shares acquired:                3,787,200 shares
3. Total cost of acquisition:                            24,113,863,800 yen
4. Period of acquisition:                                  From August 1, 2015 to August 31, 2015
5. Method of acquisition:                                Purchased on the Tokyo Stock Exchange

1. Details of the resolution of the Board of Directors' meeting held on April 27, 2015
 (1) Type of shares to be acquired:                   Shares of common stock
 (2) Total number of shares to be acquired:       Up to 15.4 million shares
                                                                    (Equivalent to 8.59% of outstanding shares excluding treasury stock)
 (3) Total cost of acquisition:                           Up to 120 billion yen
 (4) Period of acquisition:                                From May 14, 2015 to May 13, 2016

2. Cumulative total of shares repurchased in accordance with the above Board of Directors' meeting resolution
 (As of August 31, 2015)
 (1) Total number of shares acquired:                10,690,700 shares
 (2) Total cost of acquisition:                            75,849,202,969 yen