SEMICON EUROPA 2024

Tokyo Electron (TEL) is proud to be a Platinum Sponsor of SEMICON Europa 2024, taking place November 12-15 in Munich, Germany. We will present an insightful talk titled "Increasing Sustainability and Efficiency in Furnace Deposition Processes" at the Fab Management Forum.

As a leading global company of semiconductor production equipment, TEL pursues technological innovation in semiconductors to develop a dream-inspiring society. As semiconductors are increasingly becoming a vital part of social infrastructure, we challenge ourselves to make further innovations in environmental sustainability for our semiconductor production equipment. TEL’s ambition toward Net Zero is confirmed by the science-based targets for the environmental emission goals. By 2040, we aim to achieve net zero for scope 1, 2, and 3 emissions. In our presentation, we will discuss TEL’s environmental targets and show an example of reducing F2 (Fluorine) consumption of our LP-CVD system that is being used for the deposition of polycrystalline Si films while at the same time improving the efficiency of the process itself.

Join us at SEMICON Europa 2024 and be part of the exciting opportunities it offers!