ADMETA Plus 2024
Event Summary
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Date
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2024.10.03 - 2024.10.04
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Location
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Tokyo, Japan + Online
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Target
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Device Engineer Process Engineer
The Advanced Metallization Conference 2024, one of the most advanced conferences dealing with all aspects of advanced interconnect technology for advanced logic and memory devices, will be held as a hybrid event from October 3 to 4!
The ADMETA Plus 2024 theme is “Interconnection from material to VLSI system for a Sustainable Development.”
Interconnect technology is becoming more and more important to realize low resistance, large integration, low cost, high reliability, and 3D-ICs in various device applications. This conference focuses on interconnects technology related to materials, processes, device, circuit design, assembly, equipment, and characterization. Researchers and engineers from industry, academia, and government will engage in comprehensive discussions covering a wide range of topics from basics to applications. Tokyo Electron (TEL) will give two presentations including an invited talk from Dr. Akihisa Sekiguchi, Fellow, TEL!
We hope that this would be a great opportunity to learn alongside the experts, explore the semiconductor industry, and network with notable professionals!
Invited talk
Session 4: Plenary Session-2
October 3 2:05p.m. – 2:45 p.m.
Latest Technology Trends in the Semiconductor Industry
Akihisa Sekiguchi, Fellow, Tokyo Electron Ltd.
Session 8: Reliability & Metrology
16:00 – 16:20
Catalyst-free Direct Growth of Graphene on Si substrate with High Power Pulsed Sputtering (HPPS) Plasma with styrene as source molecules
Yuto Oishi 1, Masanori Shinohara 2, Fumihiko Maeda 3, and Takashi Matsumoto 4
1 Fukuoka Univ.
2 Fukuoka Univ.
3 Fukuoka Institute of Technology
4 Tokyo Electron Technology Solutions Ltd.
