A must-see for process and mechanical engineers! ISSM 2022 TEL wins Best of Best Paper Award and Best Paper Award!
Event Summary
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Date
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2022.12.12 - 2022.12.13
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Location
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Tokyo
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Target
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Process Engineer Mechanical Engineer
ISSM2022, an international conference specializing in semiconductor manufacturing technology, was held in Tokyo from December 12 to 13, 2022, covering a wide range of topics from manufacturing process technology and monitoring technology to the use of machine learning. Tokyo Electron (TEL), which has a wide range of lineup of semiconductor manufacturing equipment, made a presentation on the use of machine learning and received the Best of Best Paper Award and Best Paper Awards!
TEL will continue to pursue semiconductor technology innovation that supports sustainable development through continuous technological innovation based on its global bases in Japan, the U.S., Asia, and Europe.
About ISSM：
ISSM’s mission is to achieve the continued prosperity of the semiconductor industry by bringing about breakthroughs in semiconductor manufacturing technologies through networking between engineers in research and development fields and their counterparts in the manufacturing field.
Best of Best Paper Award
Invited & Highlight AI
Noise Reduction in SEM Images using Deep Learning
Y. Sato
Tokyo Electron
Best Paper Award
Process Monitoring & Control Method
Plasma Process Classification using Causal Discovery Technique
D. Kobayashi
Tokyo Electron
Best Paper Award (Co-authorship)
Impact of cation vacancies on leakage current on TiN/ZrO2/TiN capacitors studied by positron annihilation
Systematic search for stabilizing dopants in ZrO2 and HfO2 using first-principles calculations
Plenary Session
Challenges of Plasma Science and Technology for Green Semiconductor Manufacturing
Dr. M. Hori
Nagoya University
Session Co-Chairs: A. Shimazaki, Toshiba Nanoanalysis / T. Moriya, Tokyo Electron
Atomic-level control of plasma processing toward sub-nm node technologies
Dr. S. Hamaguchi
Osaka University
Session Co-Chairs: A. Shimazaki, Toshiba Nanoanalysis / T. Moriya, Tokyo Electron
