The 8th ICMAP & The 9th ISFM
Event Summary
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Date
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2021.01.17 - 2021.01.20
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Location
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Korea / virtual conference
The 8th International Conference on Microelectronics and Plasma Technology (ICMAP) and the 9th International Symposium on Functional Materials (ISFM) will be held both online and offline as hybrid conferences on January 17-20,2021. (Off-line conference venue: Korea)
These workshops will focus on the latest topics and active discussions on plasma technologies and functional materials in various fields, including microelectronic devices. There will be a special presentation made by Tokyo Electron (TEL) titled “Solutions to the Challenges of Quantitative Neutral Species Measurements in Process Plasmas”, we very much hope you will be able to join us for this event.
For additional information, please visit the related link.
InvitedSolutions to the Challenges of Quantitative Neutral Species Measurements in Process Plasmas
J. Zhao*1,C.Schlechte*1,J.Carroll*1,M.Hummel*1,T.Iwao*1, and K. Ishibashi*2
1 Tokyo Electron America, Inc.,
2 Tokyo Electron Technology Solutions Ltd.
