The Annual Meeting of The Japan Society of Vacuum and Surface Science
Event Summary
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Date
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2020.11.19 - 2020.01.21
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Location
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virtual conference
The Annual Meeting of The Japan Society of Vacuum and Surface Science will be held as an online virtual conference, on November 19-21. This conference will focus on fundamental research for applications related to surface science and vacuum technology. There will be a special presentation made by Tokyo Electron (TEL) titled ‟Quasi-Nanbu scheme extended to gas mixture and its application”, we very much hope you will be able to join us for this event.
Quasi-Nanbu scheme extended to gas mixture and its application
K. Denpoh （Tokyo Electron Technology Solutions Ltd.）
