An interview with Kazuki Ozawa, Graduate School of Engineering, University of Yamanashi
Technology

Driven by the vision of becoming “a company filled with dreams and vitality that contributes to technological innovation in semiconductors,” Tokyo Electron (TEL) has been promoting R&D on a global scale through various collaborations with academia and external institutions. This section, #Conference Presentations, will introduce the technological trends surrounding semiconductors, the conference presentations, and the voices of the presenters. This time, we will highlight the presentation of a co-authored paper reporting on the collaboration between TEL and universities.
Profile
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Mr. Kazuki Ozawa
Yamanashi University Graduate School of Engineering*
Entered Graduate School, University of Yamanashi in 2023
(*As of October 2024)
Mr. Ozawa's Conference Presentation and Passion for Research
Dedicated to research at the Graduate School of Engineering, University of Yamanashi, Mr. Kazuki Ozawa gave his second academic conference presentation at the Autumn Meeting of the Japan Society of Applied Physics (JSAP).
“Semiconductors will continue to be widely used in society. The privilege of being a part of the semiconductor development force is what motivates my research. I can't wait to see what kind of questions they'll ask me after the presentation!”
Mr. Ozawa made his debut in an academic presentation this spring with a poster presentation for the JSAP and has recently completed his second. “Academic presentations give me the opportunity to share my discoveries with my peers and contribute to society. I see them as an important platform for advancing the discussion on how to move the technology forward,” Mr. Ozawa said. Before giving a presentation, researchers must organize the body of their work in a way that is understandable to others who are unfamiliar with the topic. The process forces the researchers to be more objective, which often leads to new insights. Mr. Ozawa continues, “Any opportunity that exposes you to outside viewpoints is invaluable in adding depth to your research.”

“I must admit I had a hard time answering some of the questions, but that doesn’t stop me from continuing my research and trying to contribute to the innovation of high-performance semiconductor devices,” Ozawa said, flushed with anticipation for his next academic presentation.
Embracing Enjoyment in Both Work and Private Life
Ever since he was a boy, Mr. Ozawa has loved to build things by hand. These days, he is immersed in his research, arriving at the lab at 9 every morning and not leaving until early evening. However, he can be quite active in his spare time. “I don’t like to be confined to my home, I’m an outdoor person. I love climbing in the summer and skiing and snowboarding in the winter. Yamanashi, where I’m based, is a great place for both.” His ability to fully enjoy his on and off time is an enviable quality.
A message from TEL
Here is a post-presentation message to Mr. Kazuki Ozawa from Mr. Akitaka Shimizu, a TEL development engineer in charge of cooperation with the university lab.
“Good job, Kazuki! You’ve nicely summarized your ongoing research and ably discussed the results in an academic setting, demonstrating your professional growth. Very impressive. I suggest you review the takeaways from this experience to further your research. You can do it!”
Presentation information:
JSAP Autumn Meeting 2024
Title: Self-limitation etching process for Si3N4 and Si using NF3/SF6 inductively coupled plasma
Kazuki Ozawa1, Tetsuya Sato1, Akitaka Shimizu2
1. Graduate School of Engineering, University of Yamanashi
2. Tokyo Electron Technology Solutions Ltd.