International Conference on Solid-State Devices and Materials (SSDM) will be held at Nagoya, Japan, during September 2 - 5, 2019. Solid-state devices and materials related to the main semiconductors will be discussed. Tokyo Electron(TEL) will go onto the platform for the Satellite Workshop.
Machine Learning Approaches for Optimizing Plasma Process and Tool Performances
Munehito Kagaya (Tokyo Electron Technology Solutions Ltd.)