Conference presentations


International Conference on Solid-State Devices and Materials (SSDM) will be held at Nagoya, Japan, during September 2 - 5, 2019. Solid-state devices and materials related to the main semiconductors will be discussed. Tokyo Electron(TEL) will go onto the platform for the Satellite Workshop.

  • Machine Learning Approaches for Optimizing Plasma Process and Tool Performances

    Munehito Kagaya (Tokyo Electron Technology Solutions Ltd.)