ISSM 2018 (International Symposium on Semiconductor Manufacturing) focusing on semiconductor manufacturing technology will be held December 10th and 11th in Japan. ISSM has been taking a role in shaping the course of technology development with "manufacturing science," as well as creating new manufacturing technologies with the concept of shifting from "know-how" to "science". In recent years, more and more proactive discussion has also been made on utilization of IoT, big data, and machine learning.
Tokyo Electron(TEL), which has a vast line-up of semiconductor manufacturing equipment, will report seven papers including utilization of machine learning and so on.
Materials Informatics for Process and Material Co-optimization
Fumiaki Tanaka*1, Hiroshi Sato*1 , Naoki Yoshii*1, Hidefumi Matsui*2
*1 Tokyo Electron Ltd.
*2 Tokyo Electron Technology Solutions Ltd.
An Accurate Method for Determining Pattern Collapse Occurrence for Nano-Structures
Hiroshi Marumoto, Kawano Hisashi, Mitsunori Nakamori (Tokyo Electron Kyushu Ltd.)
Virtual Metrology Model Robustness Against Chamber Condition Variation by Using Deep Learning
Takuro Tsutsui, Takahito Matsuzawa (Tokyo Electron Ltd.)