TOKYO ELECTRON LIMITED

China Semiconductor Technology International Conference (CSTIC) 2018

Event Summary

Date

2018.03.11 - 2018.03.12

Location

Shanghai

As you know about the focus on the semiconductor industry in China, there are conferences about semiconductor technology in China. China Semiconductor Technology International Conference (CSTIC), organized by SEM, IMEC, and IEEE-EDS and co-organized by IMECAS, has been held since 2000 in Shanghai. This is the most comprehensive semiconductor technology conference in China followed by SEMICON China. The conference covers all aspects of semiconductor technology with focus on manufacturing and advanced technology, including detail manufacturing processes, devices design, integration, materials, and equipment. Hot topics, such as memory technology, 3D integration, MEMS Technology will also be addressed in the conference. There will be a lot of participants from China and Asia and they will debate the technology cordially.

Desirable material selection on Self-aligned Multi-patterning

Hidetami Yaegashi, Tokyo Electron Limited.


Thin Film Process Technologies for Continued Scaling

Robert Clark, et, al., TEL Technology Center, America, LLC


Benefits of atomic-level processing by Quasi-ALE and ALD technique (invited)

M.Honda, Tokyo Electron Miyagi Limited