TOKYO ELECTRON LIMITED

Response to the earthquake that occurred off the coast of Fukushima, Japan on March 16th

Regarding the earthquake that occurred off the coast of Fukushima around 23:36 on March 16th, the situations of Tokyo Electron Miyagi and Tokyo Electron Technology Solutions (Tohoku) are as follows:

Tokyo Electron Miyagi
There is no major damage or injuries to employees, buildings or facilities. Since safety confirmation of the facility has been completed, it will start usual operations from tomorrow.

Tokyo Electron Technology Solutions
There is no major damage or injuries to employees, buildings or facilities. It is operating as usual.

We expect no influence on our business.

Outline of Tokyo Electron Miyagi
Business: Development and manufacturing of plasma etch system
Location: 1 Techno-Hills, Taiwa-cho, Kurokawa-gun, Miyagi

Outline of Tokyo Electron Technology Solutions (Tohoku Plant)
Business:Development and manufacturing of deposition system
Location: 52 Matsunagane, Iwayado, Esashi, Oshu City, Iwate