Jan 14, 2021
Tokyo Electron (TEL) today announced the launch of Episode™ UL, the company’s next generation etch platform.
Designed to boost TEL customers’ fab productivity, Episode UL offers many advantages including flexible multi-chamber configurations, significant saving in footprint, ease of maintenance, and advanced Smart tool features.
TEL is the pioneer of space-saving systems with a rectangular cluster design, in which processing chambers are arranged in two horizontally opposed rows. Episode UL can flexibly accommodate between 4 and 12 chambers to maximize loading capacity based on customer fab layouts. With maximum 12 chambers configuration, the new platform’s horizontally opposed cluster design offers significant reduction in footprint per chamber for both cleanroom and utility areas. Episode UL also has a larger space for easier maintenance than that of its predecessors, ensuring greater ease of maintenance. Its transfer system and process modules are equipped with a number of sensors and high-speed control systems, enabling autonomous process control via big data analytics powered by TEL’s proprietary smart tool technology.
“Episode UL embodies the latest advancements in chip scaling and tool intelligence technologies,” said Isamu Wakui, Vice President ＆ General Manager of ES BU at TEL. “This is a technology solution that can significantly improve our customers’ fab productivity. We will continue to develop new technologies and augment our product line-up to meet the ever-intensifying challenges ahead.”
Please use the following link to watch promotion video of TEL Episode UL.
Episode is a registered trademark or trademark of Tokyo Electron Group in Japan and/or other countries.