TOKYO ELECTRON LIMITED

Announcement on Organization Changes and Personnel Changes

Tokyo Electron (TEL) announces that the following partial changes in the organization and personnel changes have been decided.

1. Partial Changes in Organization Effective on June 1st, 2017
Increased flexibility in each strategic segment and the creation of high value-added products will become even more important given the expected new stage of growth in the semiconductor and FPD markets against the backdrop of the rapid development of IoT and the advanced network society, so the Development & Production Division will be reorganized as follows.

Development & Production Group

Development & Production 1st Division
(Sadao Sasaki, General Manager)
Main products: Thermal processing system

Development & Production 2nd Division
(Hirofumi Kitayama, General Manager, Masayuki Kojima, Deputy General Manager)
Main products:Etch system

Development & Production 3rd Division
(Masami Akimoto, General Manager, Shinichi Hayashi, Deputy General Manager,
Kiyohisa Tateyama, Deputy General Manager)
Main products: Coater/developers, Surface preparation system , and other systems relating to Wet process

Development & Production 4th Division
(Yoshifumi Tahara, General Manager)
Main products: Test system and FPD etch/ash system

Technology Strategy Division
(Gishi Chung, General Manager)
Advanced Semiconductor Technology Division

2. Personnel Changes for Corporate Directors Effective on June 1st, 2017

Name Continuing Position* New Position Current Position
Tetsuo Tsuneishi Chairman of the Board Representative Director & Chairman of the Board -
Sadao Sasaki Member of the Board
EVP & General Manager,
  Tokyo Electron Ltd.
Representative Director & President,
  Tokyo Electron Tohoku
Ltd.
General Manager,
  Development & Production 1st Division
Representative Director
General Manager,
  Development & Production Division, (Deposition),
  Product Development Division

* Some Continuing Positions of Subsidiary's Board of Directors are abbreviated.

3. Personnel Changes for Executive Officers Effective on June 1st, 2017

Name Continuing Position* New Position Current Position
Hirofumi Kitayama Member of the Board,
  Tokyo Electron Ltd.
Representative Director & President,
  Tokyo Electron Miyagi Ltd.
EVP & General Manager,
  Development & Production 2nd Division
-
Masami Akimoto Member of the Board,
Tokyo Electron Ltd.
Representative Director &
President,
  Tokyo Electron Kyushu Ltd.
EVP & General Manager,
  Development &
Production 3rd Division
SVP & Deputy General Manager,
  Development
Division (Coat & Clean),
  Development & Production Division
Gishi Chung Member of the Board,
SVP & General Manager
General Manager,
  Technology Strategy
Division
Deputy General Manager,
  Development Division
(Process),
  Development & Production Division
Tatsuya Nagakubo Member of the Board,
  Business Ethics,
  CSR Promotion
Deputy General Manager,Corporate Administration Division, Human Resources, General Affairs, CSR Promotion
SVP & General Manager VP & General Manager
Yoshifumi Tahara Representative Director & President,
  Tokyo Electron Yamanashi Ltd.
SVP & General Manager,
  Development & Production 4th Division
VP & Deputy General Manager, Development Division
  (Deposition, ATS/FPD),
  Product Development Division
Yoshinobu Mitano General Manager,
  ESBU
SVP & General Manager VP & General Manager
Masayuki Kojima VP,
  Tokyo Electron Ltd.
Senior Executive Vice
President,
  Tokyo Electron Miyagi Ltd.
Deputy General Manager,
  Development & Production 2nd Division
Deputy General Manager,
  Development Division (Etch),
  Development & Production Division
Akihisa Sekiguchi VP & General Manager Advanced Semiconductor Technology Division,
  Technology Strategy Division
Advanced Semiconductor Technology Division,
  Development &
Production Division
Kazushi Tahara VP
Director,
  System Development Center
General Manager,
  System Development,
  Development & Production 1st Division
Deputy General Manager,
  Production Division (DRY),
  Development & Production Division
Toshihiko Nishigaki VP & General Manager
Director,
  Corporate Project Dept.,
  Development & Production Division,
  Tokyo Electron Ltd.
Chairman & President,
  TEL FSI, Inc.
Advanced Semiconductor Technology Division
  Business Innovation,
  Technology Strategy Division
Development Division(Business Innovation)
  Development &
Production Division
Shunichi Iimuro SVP & General Manager,
  Tokyo Electron Yamanashi
Ltd.
Senior Manager (Certas),
  Development & Production 2nd Division
Senior Manager,
  Development Division (Etch),
  Development & Production Division
Shinichi Hayashi Deputy General Manager, CTSPS BU (SPS),
  Tokyo Electron Ltd.
SVP & General Manager,
  Tokyo Electron Kyushu Ltd.
VP & Deputy General Manager,
  Development & Production 3rd Division
Senior Manager,
  Development Division (Coat & Clean ),
  Development & Production Division
Kiyohisa Tateyama SVP & General Manager,
  Tokyo Electron Kyushu Ltd.
VP & Deputy General Manager,
  Development & Production 3rd Division (Production)
Deputy General Manager,
  Production Division (WET),
  Development & Production Division
Yuichi Abe Senior Manager,
  Business Planning,
  ATS BU
- Senior Manager
  (Marketing of Back End Process),
  Development & Production Division
Hisashi Inoue VP & General Manager,
  Tokyo Electron Tohoku Ltd.
Person in charge of Corporate Safety,
  Development & Production 2nd Division
Person in charge of Corporate Safety,
  Development & Production Division
Seiya Odashima Director, Customer Engineering Dept.,
  Tokyo Electron Miyagi Ltd.
Vice person in charge of Corporate Safety,
  Development & Production 2nd Division
Vice person in charge of Corporate Safety,
  Development & Production Division

*Some Continuing Positions of Subsidiary's Board of Directors are abbreviated.

4. Personnel Changes Effective on June 1st, 2017

Name Continuing Position New Position Current Position
Sanjeev Kaushal Account Technology Manager
Director, Corp Tech & MTS,
  Tokyo Electron U.S. Holdings, Inc.
Project Leader, Collaborative Innovation Project,
  Development & Production 1st Division
Senior Manager, Development Division, (Collaborative Innovation),
  Development & Production Division