TOKYO ELECTRON LIMITED

Announcement on Personnel Changes

Tokyo Electron Limited (TEL) announces that the following personnel changes have been decided.

1. Personnel Changes in Representative Directors of Subsidiaries Effective on April 1st, 2016
NameContinuing Position*New PositionCurrent Position
Gishi ChungCorporate DirectorSVP & Deputy General Manager,
 Development & Product Division,
 Corporate Product Development
 General Manager,
 Innovative Technology Planning Division
Chairman of the Board,
 TEL Venture Capital, Inc.
Chairman of the Board,
 TEL NEXX, Inc.
-
Toshiki KawaiRepresentative Director and President, Chief Executive Officer (CEO),
 General Manager,
 Business Division
Member of the Board,
 TEL Venture Capital, Inc.
-Chairman of the Board,
 TEL Venture Capital, Inc.
Nathan BaxterAccount Technology General ManagerChairman of the Board,
 TEL Epion Inc.
President,
 TEL Epion Inc.
Michael Graf-Acting President,
Member of the Board,
 TEL Epion Inc.
VP,
 TEL Epion Inc.
Barry MayerSVP & General Manager,
 Global Strategy
President,
 Tokyo Electron U.S.Holdings, Inc.
Member of the Board,
 TEL NEXX, Inc.
Member of the Board,
 TEL Epion Inc.
-Chairman of the Board,
 TEL NEXX, Inc.
Chairman of the Board,
 TEL Epion Inc.

* Some Continuing Positions of Subsidiary's Board of Directors are abbreviated.

2. Personnel Changes for Executive Officers in Subsidiaries Effective on April 1st, 2016
NameContinuing Position*New PositionCurrent Position
Larry SmithGeneral Manager,
 US Region Division
President,
 Tokyo Electron America, Inc.
Member of the Board,
 Tokyo Electron America, Inc.
-
Alexander OscilowskiPresident,
 TEL Technology Center, America, LLC
Manager,
 TEL Technology Center, America, LLC
-
Keiichi EnjojiDirector,
 VC Dept.
President,
 TEL Venture Capital, Inc.
Member of the Board,
 TEL Venture Capital, Inc.
-
Akihisa SekiguchiVP & General Manager,
 Advanced Semiconductor Technology Division
Manager,
 TEL Technology Center, America, LLC
-
Tsuyoshi Aruga--Corporate Director
 Senior Executive Vice President,
 Tokyo Electron Yamanashi Ltd.
Shigetoshi HosakaCorporate Consultant
 (Support for Innovative Technology Planning Division)
-Member of the Board,
 TEL Venture Capital, Inc.