Announcement on Changes in Corporate Director and Audit & Supervisory Board Member

Tokyo Electron Limited announces that its Board of Directors has resolved on the candidates for Corporate Director on March 26, 2014. The official decision on this matter will be made at the Annual General Meeting of Shareholders which will be held on June.

1. Nine Candidates for Corporate Director
Tetsuro Higashi
Tetsuo Tsuneishi
Hirofumi Kitayama
Kenji Washino
Hikaru Ito
Yoshiteru Harada
Tetsuro Hori
Hiroshi Inoue (Outside Director)
Masahiro Sakane (Outside Director)

2. Resignation from Corporate Director
Kiyoshi Sato (will be appointed to Corporate Consultant of Tokyo Electron Limited)
Takaaki Matsuoka (will be appointed to Corporate Consultant of Tokyo Electron Limited)

3. Resignation from Audit & Supervisory Board Member
Mitsutaka Yoshida