Announcement on Establishment of a New Subsidiary in Singapore

Tokyo Electron Ltd. today announced its decision to establish a new subsidiary in Singapore as follows.

1. Objective of establishment
The merger is designed to strengthen sales in the Singapore and Southeast Asia region following the establishment of a local subsidiary in Singapore.

2. Outline of a new subsidiary
（1）Company Name: Tokyo Electron Singapore PTE Ltd.
（2）Address: 4 Changi North Street, 1 Hermes Epitek Centre, Singapore
（3）Business operations: Sales and services support of semiconductor production equipment and parts
in Singapore and South East Asia area
（4）Capital Stock: 250,000 Singapore dollars
（5）Issued Stock: 250,000 Shares
（6）Shareholders: Tokyo Electron Ltd. 100%
（7）Representative Director: Masaaki Hata
（8）Establishment: April 1, 2012 (tentative)
（9）Accounting Period: March 31