TOKYO ELECTRON LIMITED

Tokyo Electron Announces Changes in the Important Personnel

The following changes in the important personnel will become effective on January 1st 2011.

1. Changes of Executive Officers

Name Continuing Position* New Position Current Position
Keisuke Koizumi General Manager, IT VP & General Manager,
 Corporate Procurement
-


2. Personnel Changes for the Director and the Executive Officer of Subsidiaries (For reference)

Name Continuing Position* New Position Current Position
Yoshifumi Tahara President &
 Representative Director,
 Tokyo Electron Tohoku
 Ltd.
- Deputy General Manager,
 Manufacturing Division
Yoichi Kurono Deputy General Manager,
 Manufacturing Division
SVP,
 Tokyo Electron AT Ltd.
President,
 Tokyo Electron Kunshan
 Ltd.
General Manager,
 Corporate Procurement


3. Other Personnel Changes (For reference)

Name Continuing Position* New Position Current Position
Yasushi Nakamura - VP,
 Tokyo Electron AT Ltd.
Director,
 General Affairs Dept.
Masashi Ibuki - Director,
 General Affairs Dept.
Director,
 Finance Dept.
Kazuya Nanbu - Director,
 Finance Dept.
Senior Manager,
 Corporate Strategic Planning
Dept.