TOKYO ELECTRON LIMITED

Tokyo Electron Announces Organizational Changes

The following changes in the company organization will become effective on October 1st, 2010.

1. Organizational Changes

1.The 3DI Dept. will be newly established under the 3DI Division (General Manager: Yoshinobu Mitano) in order to reinforce sales and marketing function of 3DI business.

2.The RLSA Sales Dept. will be renamed the RLSA Dept.

2. Personnel Changes

NameContinuing Position*New PositionCurrent Position
Hideki Ito-Director of 3DI Dept.,
3DI Division
Senior Manager of
Etch Systems Dept.