AEC/APC Symposium Asia 2025
Event Summary
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Date
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2025.11.25 - 2025.11.26
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Location
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Fukuoka International Congress Center
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Target
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Device Engineer Process Engineer Mechanical Engineer AI Engineer Software Engineer Data Scientist / Analyst Other
AEC/APC (Advanced Equipment Control/Advanced Process Control) Symposium 2025 will be held in Fukuoka on November 25–26.
AEC/APC is called the core of the scientific manufacturing technology. The technology has created the extensive progress of the productivity improvement and the yield improvement in the semiconductor manufacturing area. The technology discussed in the conferences has been applied and used in a variety of technologies.
Tokyo Electron (TEL) has supported the symposium as a Platinum Sponsor since 2011.The symposium will be held under the theme "Advancing AEC/APC through the Fusion of Domain Knowledge and AI/ML”. TEL will have two members serve on the technical program committee as well as one tutorial presenter, two oral speakers, and one session chair.
We look forward to welcoming you at the symposium.
November 25
14:15-14:35,
Session 1 DA-019
The Integration of Machine Learning and Equipment Knowledge: Two Approaches to Film Deposition Data Analysis
Huizhen Bu, Tokyo Electron Technology Solutions
16:50-17:10
Session 2 DA-020
Semi-Automatic Critical Dimension Measurement Method in SEM Image with Critical Point Mapping Algorithm
Takahiro Nakamura, Tokyo Electron
November 26
9:50-11:40
Session 3
Session Co-Chairs: Hisato Tanaka, Tokyo Electron / Tomoya Tanaka, Tower Partners Semiconductor
Tutorial speech 2
11:40-12:25
Tutorial 2
Process Informatics in Semiconductor Manufacturing
Hironori Moki, Tokyo Electron
