77th Annual Gaseous Electronics Conference (GEC 2024)
Event Summary
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Date
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2024.09.30 - 2024.10.04
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Location
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San Diego, CA
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Target
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Device Engineer Process Engineer
The 77th Annual Gaseous Electronics Conference (GEC 2024) will be held from September 30 to October 4 at San Diego, California. GEC is an annual international conference organized by the American Physical Society (APS) Division of Atomic, Molecular, and Optical Physics (DAMOP). The GEC has a long leadership history of presenting fundamental and basic science contributions on plasma sources, diagnostics, simulation, plasma chemistry, basic phenomena, atomic and molecular processes. In recent years, GEC has also been a leading venue for reporting on emergent areas of plasma-biotechnology, plasma medicine, multiphase plasmas, environmental applications and atmospheric-pressure plasma systems.
Tokyo Electron (TEL), which has a broad product lineup including plasma etch system, will give three invited presentations, including a co-authored paper.
Invited Speakers:
Session ER2: Plasma Etching II
11:30 AM–12:00 PM, Thursday, October 3, 2024
Room: Shutters West I and II
Challenges in Semiconductor Etch Development and Opportunities for Plasma Modeling: An Industrial Perspective
Pingshan Luan, TEL Technology Center, America, LLC
Session EM2: Workshop II: Data-driven Plasma Science
2:30 PM–3:00 PM, Monday, September 30, 2024
Room: Great Room 6-8
Plasma process optimization using machine learning
Tsuyoshi Moriya, Tokyo Electron Technology Solutions Ltd.
Session EM2: Workshop II: Data-driven Plasma Science
4:00 PM–4:30 PM, Monday, September 30, 2024
Room: Great Room 6-8
A Study for Solving the Boltzmann Equation with Variable E/N using Physics-informed Neural Networks
Jinseok Kim1, Kazuki Denpoh1, Satoru Kawaguchi2, Kohki Satoh2, Masaaki Matsukuma1
1,Tokyo Electron Technology Solutions Limited
2,Muroran Institute of Technology
