Must see for Device and Process Engineers! PESM2023

Event Summary


2023.06.19 - 2023.06.20


Grenoble ,France


Device Engineer Process Engineer

Concept: Plasma Etch

Tokyo Electron (TEL) is proud of to be a sponsor of the Plasma Etch and Strip in Microtechnology 2023 (PESM) will be held in June 19-20 in Grenoble (France). PESM aims to provide a forum for open discussion between science and technology and will feature invited talks by scientific and technical leaders in etch to stimulate technical discussions. Scientists, process engineers, and PhD students from around the world as well as industrial partners in the field of dry etch, including plasma processing and other vacuum-based removal techniques (ion beam, neutral beam, gas thermal etch, etc.) are invited to participate. Topics may include both highlights of fundamental and applied research, as well as issues related to the introduction of new technologies into manufacturing. 1 presentation from TEL and collaborators will give a presentation in July 19. We hope to see you there!

TEL will continue to contribute to the technological innovation of semiconductors by always pursuing the Best Products and Best Technical Service.

Monday, June 19, 2023
Plasma processes for more than Moore applications
Advanced Etch Technologies for Photonics Waveguide Patterning
Raley Angelique, Tokyo Electron America