TOKYO ELECTRON LIMITED

A must-see for all scientists and engineers! The 2022 International Conference on Frontiers of Characterization and Metrology for Nanoelectronics (FCMN)

Event Summary

Date

2022.06.20 - 2022.06.23

Location

United States(San Jose)

Target

Device Engineer Process Engineer Mechanical Engineer Software Engineer AI Engineer Data Scientist / Analyst Other

The 2022 International Conference on FCMN will be held at California from June 20-23. The conference consists of formal invited presentation sessions and poster sessions for contributed papers. The poster papers cover new developments in materials and structure characterization/metrology down to the nanoscale. Tokyo Electron (TEL) is accelerating its efforts to apply data science to research and development. At this conference, TEL will give a poster presentation titled “Machine learning-assisted characterization of hafnia-based ferroelectric thin films“.
The semiconductor industry is evolving faster than you can imagine. The FCMN will highlight major issues and provide critical reviews of important materials and structure characterization and nearline/inline metrology methods, including hardware, data analysis, and AI and machine learning, as the industry both extends the technology deep into the nanoscale and increases the diversity of devices and systems. In addition, this conference will bring together scientists and engineers interested in all aspects of the characterization technology needed for nanoelectronic materials and device research, development, integration, and manufacturing. All approaches are welcome: chemical, physical, electrical, magnetic, optical, in situ, and real-time control and monitoring. We very much hope you will be able to join us for this event!

Machine learning-assisted characterization of hafnia-based ferroelectric thin films