TOKYO ELECTRON LIMITED

A must-see for process engineers! PlaCEP 2022

Event Summary

Date

2022.05.16 - 2022.05.19

Location

France(Orleans)

Target

Process Engineer

In an effort to help facilitate the progression of Cryogenic Etching Processes, the first International Workshop on Plasma Cryogenic Etching Processes (PlaCEP) will be held on May 16-19, 2022 in Orleans, France.
Leaders in the field will gather from industry and academia to discuss recent research on the characteristic technology of cryogenic among plasma etch technologies. The latest experimental results, modeling and simulation, and mechanism analysis will be discussed from various angles.
Tokyo Electron (TEL) will give an invited talk. We very much hope you will be able to join us for this event.

InvitedCryogenic Atomic Layer Etching: What Plays the Magic?