TOKYO ELECTRON LIMITED

2021 Virtual MRS Spring Meeting

Event Summary

Date

2021.04.17 - 2021.04.23

Location

virtual conference

Target

Process Engineer

The 2021 Virtual MRS Spring Meeting (Materials Research Society) will be held virtually on April 17-23. Many engineers who research materials will attend to the conference from all over the world. And they will discuss and repot the latest research results. Tokyo Electron (TEL) will report on the current status and prospects of Hf-based ferroelectric thin-films and devices.

InvitedStatus and Outlook for Ferroelectric Hf-Based Films and Devices

R. Clark
TEL Technology Center, America, LLC