CSTIC / SEMICON CHINA 2021

Event Summary

Date: 2021.03.17 - 2021.03.19

Location: China（Shanghai）

Target: Device Engineer Process Engineer Mechanical Engineer Software Engineer AI Engineer Data Scientist / Analyst Other

Tokyo Electron (TEL) is proud of be a sponsor of the SEMICON CHINA 2021 to be held on March 17-19. At the TEL booth (Hall N1, Booth 1401), we will introduce our equipment and process technologies. On March 17, we will give a presentation on supercritical drying technology. TEL has developed a pattern collapse-free drying method that uses a supercritical fluid, bringing the technology to the market as equipment for mass production.
Prior to SEMICON CHINA2021, CSTIC will give more technical lectures. We will give 3 lectures at CSTIC.
Please join and be inspired by TEL’s presentations!

CSTIC 2021
Invited

(1) Innovative Future Etch Technology by Atomic-order control
(2) Practical Solutions to the Challenges of Quantitative Radical Species Sensoring in Process Plasmas
(3) New frontiers of device fabrication with atomic precision
(1)
Y. Kihara, T. Katsunuma, S. Kumakura, T. Hisamatsu, T.Niizeki, M.Tomura, M. Honda
Tokyo Electron Miyagi Ltd.
(2)
J. Zhao^*1, P. Ventzek^*1, C. Schlechte^*1, J. Carroll^*1,
T. Iwao^*２, and K. Ishibashi^*2
1 Tokyo Electron America, Inc.
2 Tokyo Electron Technology Solutions Ltd.
(3)
P.L.G. Ventzek
Tokyo Electron America, Inc.