The 68th JSAP SPRING MEETING 2021
Event Summary
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Date
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2021.03.16 - 2021.03.19
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Location
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virtual conference
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Target
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The JSAP Spring Meeting will be held virtually on March 16-19. Various academic topics such as radiation, semiconductors, and bioelectronics will be actively discussed on this meeting. Tokyo Electron (TEL) and collaborators will give 2 presentations including a tutorial.
Machine Learning Approaches Optimizing Semiconductor Manufacturing
T. Moriya
Tokyo Electron Ltd.
Control of a-C:H Film Properties by Tailored Waveform Excited PECVD
R. Iwamoto*1, K. Kamataki*1, N. Itagaki*1, K. Koga*1,2, M. Shiratani*1, T. Shindo*3, S. Tanaka*3, T. Matsudo*3
1.Kyushu Univ.
2.NINS
3.Tokyo Electron Technology Solutions Ltd
