ISPlasmaISPlasma2021/IC-PLANTS2021
Event Summary
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Date
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2021.03.07 - 2021.03.11
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Location
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virtual conference
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Target
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ISPlasma/IC-PLANTS will be held offline on March 7-11. In this symposium, the latest research in plasma science, its applications for the processing and manufacturing of nitride semiconductors and nanomaterials will be discussed. This symposium also covers environmental issues and bio-sensing technologies. Tokyo Electron (TEL) and collaborators will report on the latest plasma measurement technologies.
