ISSM 2020
Event Summary
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Date
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2020.12.15 - 2020.02.16
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Location
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virtual conference
Tokyo Electron (TEL) is proud of be a sponsor of the ISSM 2020 to be held via an online virtual conference, on December 15-16. This conference will focus on many topics related to semiconductor manufacturing technology. The conference will cover many aspects of manufacturing process technologies, monitoring technologies and the utilization of machine learning. In addition TEL will give an online presentation including a report on productivity improvement. Please join us!
Best Paper Award!!Seasoning Optimization by using Optical Emission Spectroscopy
M. Shiga*1, Y. Suzuki*2,Y. Fukazawa*2,H.Omine*1,M. Kitsunezuka*1, H. Moki*1, Y. Kataoka*1, T. Matsuzawa*1, T.Makita*2, K. Takasawa*2, T. Yamamoto*2, T. Funakubo*2
*1 Tokyo Electron Ltd.
*2 Tokyo Electron Miyagi Ltd.
