TOKYO ELECTRON LIMITED

The 84st SYMPOSIUM ON SEMICONDUCTORS AND INTEGRATED CIRCUITS TECHNOLOGY

Event Summary

Date

2020.09.15 - 2020.09.16

Location

virtual conference

The 84st symposium on semiconductors and integrated circuits technology will be held as an online conference, on September 15-16. Active discussions will focus on the latest semiconductor and integrated circuit technologies. Tokyo Electron (TEL) will have the honor of participating in an invited talk titled, “EUV patterning technology and DSA process introduction”. Join and inspired at the online conference as watching a great presentation from TEL.

Makoto Muramatsu (Tokyo Electron Kyushu Ltd.)