CSTIC 2019
Event Summary
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Date
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2019.03.18 - 2019.03.19
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Location
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Shanghai
The International conference “China Semiconductor Technology International Conference(CSTIC) 2019” will be held March 18-19 in China. Semiconductor manufacturing technologies will be discussed there.
Tokyo Electron(TEL) will present seven topics including five invited presentations about the latest semiconductor manufacturing technology.
EUV SADP SAB Integration Scheme for Sub 30-nm Pitch Mx Patterning
Kiyotaka Imai*1, T. Yamamoto*1, A. Raley*2, E. Liu*2, and A. Ko*2
*1 Tokyo Electron Ltd.
*2 TEL Technology Center, America, LLC
Precise Etching Profile Control by Atomic-Scale Process
Y. Kihara, T. Katsunuma, M. Tabata, T. Hisamatsu, and M. Honda (Tokyo Electron Miyagi Ltd.)
