Kumamoto's Cutting-Edge Technology Goes Global
Tokyo Electron Kyushu Process Development Building

In autumn 2025, Tokyo Electron Kyushu completed its new Process Development Building. Designed to enable more efficient development and respond to market growth and increasingly diverse technical needs, the facility will further strengthen the company's competitiveness. The article features the inside of the facility, which prioritizes comfortable working conditions and operational efficiency.

Purpose of the Process Development Building

Tokyo Electron Kyushu develops and manufactures coaters/developers, cleaning systems, and 3D packaging systems. Its headquarters at the Koshi site contains multiple cleanrooms and has supported the TEL Group’s growth to date; however, those facilities were completed about 25 years ago and are reaching capacity.

Amid the recent AI boom, demand is rising for semiconductors that deliver ultra‑high speed, large capacity, high reliability, and low power consumption. Innovation is advancing along two axes—miniaturization and higher integration—and strong market growth is expected.

Tokyo Electron Kyushu has been introducing new equipment to support 3D integration, such as bonders and laser‑processing systems, and its product lineup is expanding each year. To meet the anticipated growth of the semiconductor market, the company planned a new Process Development Building.

Key features of the Process Development Building

1.Smart

The cleanroom is designed with a minimal number of columns, removing layout constraints. This allows optimal equipment placement, fewer limits on tool size, and a more flexible development environment—improving development efficiency.

2.Flexible

Support equipment that was previously installed inside the cleanroom has been moved to a utility room on the floor below, maximizing usable cleanroom space. The layout can also be adjusted quickly during development to accommodate sudden changes.

3.Efficient

The design focuses on operational efficiency. Notably, the connecting corridor between the existing building and the new Process Development Building separates cleanroom routes from general passageways, allowing staff to move while wearing cleanroom suits. Fewer suit changes ease the burden on employees and help improve work efficiency.

4.Resilient

The building incorporates state-of-the-art seismic isolation technology. In the unlikely event of an earthquake, safety is prioritized, providing a resilient operational environment.

5.Locally Rooted

Office and other workspaces use locally sourced Kumamoto timber and incorporate motifs of the Aso mountains and geological strata into the design, creating a space that reflects Kumamoto’s local character. The design aims not only to improve employee comfort but also to boost intellectual productivity.

6.Creative

The space, named ‘KYOSO’ (kyōsō)—a Japanese term encompassing meanings like co‑creation, competition, and concerted collaboration—was designed to accelerate collaboration inside and outside the company and quickly bring creative ideas to life. A full‑wall mural depicting Kumamoto's majestic natural scenery was painted by students from Kumamoto University.

The facility also includes recharge rooms where employees can rest and replenish their energy to maximize performance.

Bringing Made‑in‑Kumamoto Cutting‑Edge Technologies to the World

To meet the projected market expansion and increasingly diverse technology needs, the company must continue to produce one‑of‑a‑kind innovations and strengthen its competitiveness. Tokyo Electron Kyushu will deepen collaboration with other TEL Group sites and promote cutting‑edge Made‑in‑Kumamoto technologies to the world.