Tokyo Electron Miyagi Development Building No. 3 Embodies the Smart Factory of the Future

Along with the development of the IT society, demand for semiconductors is increasing year by year. This has led to calls for semiconductor manufacturers to strengthen their production capabilities. Semiconductor production equipment manufacturers like Tokyo Electron are expected to not only develop cutting-edge technology but also contribute to improving customer productivity. Tokyo Electron Miyagi's Development Building No. 3, completed in April 2025, is a state-of-the-art development base that caters to changes and needs of the times. The article features the construction the background of the Development Building No. 3 as well as its future prospects.

Background and Aims of the Construction of the Development Building No. 3

The market for etching production equipment continues to see technological innovation alongside advances in miniaturization, and is expected to grow significantly. With the completion of the Third Development Building, TEL will further strengthen its technology development capabilities to meet an expanding market and increasingly diverse technical needs. By delivering products that incorporate the functions our customers require in a timely manner, TEL aims to contribute to sustainable mid- to long-term growth and the advancement of society.

To achieve semiconductor productivity, a process known as "reliability evaluation process" is essential to confirm and guarantee that semiconductor production equipment will operate stably over the long term and that it is less susceptible to breakdowns and performance degradation. The company is also promoting "Smart R&D" that utilizes AI and other technologies, aiming to achieve both operational efficiency and advanced research and development.

An Environment that Emphasizes Work efficiency and Well-Being

In routine operations, mechanization and automation are being implemented to improve work efficiency. Specifically, a new system has been introduced for work that was previously done manually. By simply holding a tablet camera over the equipment, data is automatically read, and inspection results are recorded. There are countless instruments of various types scattered throughout the development building, and automatic collection was difficult with conventional methods. But, it now became possible to significantly reduce the workload associated with daily inspections of power utility equipment.

These efforts are expected to significantly reduce labor hours. Masaru Sasaki, Division Manager, Vice President and General Manager of Product Development Division 2 at Tokyo Electron Miyagi, said, "Employees will have more time to think. By focusing on tasks such as research and development and quality improvement, we hope to create a virtuous cycle in which equipment performance and customer satisfaction improve, leading to an increase in new inquiries."

Additionally, the Development Building No. 3 also focuses on well-being, placing importance to create a comfortable working environment for all employees. For example, the "refreshment window" in the clean room is one of features. Clean rooms tend to be pure white, inorganic spaces. But, by installing a window to create a more human-like working environment, employees can see the weather and outside environment from inside the clean room. In addition, the Development Building No. 3 is also equipped with a lounge and an open balcony that employees can use freely and refresh themselves during the workday.

Towards the Realization of Smart Factories

Lastly, Sasaki talks about the future aspirations.

"By combining advanced development using digital technology with efficient operations, the Development Building No. 3 aims to make the 'Smart Factory Concept' a reality.

We believe that our mission is to create products that satisfy our customers while promoting cutting-edge development. To achieve this, we must build “win-win” relationships with our customers as partners striving to evolve together, rather than simply being a supplier that meets their needs. We believe it is key to our future business growth. It requires more sophisticated output. We would like to reduce the burden on our employees and create an environment where they can focus more on their work, so that they can spend more time on something creative.

Becoming the world's best semiconductor production equipment factory has been a goal of Tokyo Electron Miyagi since its founding. With the opening of the Development Building No.3, our development capabilities will be significantly enhanced, bringing us much closer to achieving our goal. We will work together with everyone to make it happen."