TOKYO ELECTRON LIMITED

Determination of Share Subscription Rights for Stock-linked Compensation

We would like to inform that Tokyo Electron (TEL) has decided that the undetermined items regarding the share subscription right for the purpose of implementing stock-linked compensation that were resolved at its Board of Directors meeting held on June 21, 2022 have been determined as follows.

1. People eligible for the granting of subscription rights, number of the share subscription rights to be granted.

(1) The subscription rights as stock compensation for TEL corporate directors

TEL corporate directors (excluding outside directors) 25,000 shares 3 people

(2) The subscription rights as stock compensation for executive officers, etc. of TEL and TEL subsidiaries

・People who are judged as necessary among TEL executive officers, senior employees as of the final day of the 59th FY (excluding (i) people who are concurrently serving as TEL corporate directors as of the date of allotment and, (ii) people who are not become TEL corporate officers as of the date of allotment of TEL corporate directors who will resign at the end of this General Meeting of Shareholders)

29,600 shares 40 people

・People who are judged as necessary among corporate directors and executive officers, senior employees of TEL’s subsidiaries in Japan as of the final day of the 59th FY, as well as corporate directors and executive officers, senior employees of TEL’s overseas subsidiaries

22,400 shares 58 people

2. Number and type of shares to be issued for the subscription rights

(1) The subscription rights as stock compensation for TEL corporate directors

TEL common stock of 25,000 shares

(2) The subscription rights as stock compensation for executive officers, etc. of TEL and TEL subsidiaries

TEL common stock of 52,000 shares

3. Aggregate number of the subscription rights

(1) The subscription rights as stock compensation for TEL corporate directors

250 (The number of shares to be issued for one subscription right is 100 shares)

(2) The subscription rights as stock compensation for executive officers, etc. of TEL and TEL subsidiaries

520 (The number of shares to be issued for one subscription right is 100 shares)