Announcement on Changes in Corporate Director of TEL, and Personnel Changes

Tokyo Electron (TEL) announces that its Board of Directors has decided on the list of candidates for Corporate Director on April 25, 2018. The official resolution on these matters will be made at the Annual General Meeting of Shareholders held on June 19, 2018.

In addition, TEL also announces that the following personnel changes.

(I) Twelve Candidates for Corporate Director

i) Reappointed Candidates for Corporate Director

Tetsuo Tsuneishi

Toshiki Kawai

Tetsuro Hori

Sadao Sasaki

Hirofumi Kitayama

Masami Akimoto

Tatsuya Nagakubo

Kiyoshi Sunohara

Tetsuro Higashi

Hiroshi Inoue (Outside Director)

Charles Ditmars Lake II (Outside Director)

ii) Newly elected Candidate for Corporate Director

Michio Sasaki (Outside Director) (currently Corporate Director, ZUIKO Corporation)

(II) Retiring Corporate Director

Gishi Chung

2．Personnel Changes of TEL Effective on May 1st, 2018