TOKYO ELECTRON LIMITED

Announcement on Personnel Changes

Tokyo Electron Limited (TEL) announces that the following personnel changes have been decided.

1. Personnel Changes in Representative Directors of Subsidiaries Effective on December 1st, 2016

NameContinuing Position*New PositionCurrent Position
Toshiki KawaiRepresentative Director and President, Chief Executive Officer (CEO),
General Manager,
 Business division
Member of the Board,
 Tokyo Electron U.S. Holdings, Inc.
-Chairman of the Board,
 Tokyo Electron U.S. Holdings, Inc.
Barry MayerSVP & General Manager,
 Global Strategy
Member of the Board,
 Tokyo Electron America, Inc.
Manager,
 TEL Technology Center, America, LLC
Member of the Board,
 TEL Venture Capital, Inc.
Member of the Board,
 TEL Epion Inc.
Member of the Board,
 TEL NEXX, Inc.
Member of the Board,
 TEL FSI, Inc.
Chairman of the Board,
 Tokyo Electron U.S. Holdings, Inc.
President, Member of the Board,
 Tokyo Electron U.S. Holdings, Inc.
Larry SmithPresident, Member of the Board,
 Tokyo Electron America, Inc.
President, Member of the Board,
 Tokyo Electron U.S. Holdings, Inc.
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* Some Continuing Positions of Subsidiary's Board of Directors are abbreviated.


2.Other Personnel Changes Effective on December 1st, 2016

NameContinuing Position*New PositionCurrent Position
Kevin ChaseySVP,
 Tokyo Electron America, Inc.
Deputy General Manager,
 US Region Division
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