TOKYO ELECTRON LIMITED

Announcement on Personnel Changes

Tokyo Electron Limited (TEL) announces that the following personnel changes have been decided.

1. Personnel Changes in Corporate Directors of Subsidiaries Effective on August 1st, 2016*
*The effective date for overseas subsidiaries depends on registration procedure of each country.

Name Continuing Position** New Position Current Position
Hideyuki Tsutsumi SVP & General Manager,
  Global Field Division
Representative Director & President,
  Tokyo Electron FE Ltd.
Global Service (FSBU)
-
Takeo Sasaki - Senior Manager,
  President Office,
  Tokyo Electron FE Ltd.
Global Field Division,
  Tokyo Electron Ltd.
VP & Deputy General Manager,
  Global Field Division,
Production Division (Corporate Safety)
  Representative Director & President,
  Tokyo Electron FE Ltd.
Member of the Board,
  Tokyo Electron India Private Ltd.
Tetsuro Hori Representative Director,
Internal Control
EVP & General Manager,
  Corporate Administration Division,
  Accounting, Finance,
   Intellectual Property,
  Corporate Strategy, IR,
  Compliance & Internal Control
Member of the Board,
  Tokyo Electron India Private Ltd.
-

** Some Continuing Positions of Subsidiary's Board of Directors are abbreviated.


2. Personnel Change for Executive officer of Subsidiary Effective on August 1st, 2016

Name Continuing Position New Position Current Position
Kazuo Hagio Deputy General Manager,
  Development & Production Division,
  Production Division (WET)
Senior Executive Vice President,
  Tokyo Electron Kyushu Ltd.
SVP & General Manager,
  Tokyo Electron Kyushu Ltd.